Structure of calcinated TiO₂ has been examined by X-ray diffraction (XRD) and Scanning Electron Microscope (SEM) analysis. The formation of the single phase TiO₂ was confirmed by X-ray diffraction (XRD) and the structural parameters were refined by the Rietveld analysis. A good agreement between observed and calculated X-ray diffraction pattern was obtained from the Rietveld refinement using space group I 41/ amd. The calculated unit cell parameters are used to plot the structure. XRD data shows anatase phase of TiO₂ and SEM micrograph show a uniform spherical crystalline size. Photoluminescence (PL) was taken at different excitation wavelength. PL emission spectra show broad spectra from 400 nm to 500 nm. Dielectric constant and loss have been measured as a function of frequency (100Hz-1MHz) and temperature (RT to 300⁰C). Combinations are observed in between dielectric constant and dielectric loss. Dielectric constant and Loss are decreases with increase in frequency. The results are discussed in detail.